Рентгенооптические элементы
X-ray diffraction gratings
Rectangular grooves with period from 0.5 µm
Groove height up to 200 nm
Grating size up to 20.20 mm2
Substrate: Si, SiO2
Coatings:
- thin films W, Al, Au etc.
- multilayer mirrors W/Si, Mo/Be, Cr/Sc etc.
- substrate etching
Multilayer Diffraction Grating
period D=2 µm50 W/Si bilayers(d=50 Å)
Multilayer Diffraction Grating with random position of grating grooves
period D=2 mm50 W/Si bilayers(d=50 Å)
2D grating with round reflecting multilayer elements
a: d=6 mm, δΘ=0.036°
a: d=18.9 mm, δΘ=0.012°
a: d=13.4 mm, δΘ=0.016°
a: d=8.5 mm, δΘ=0.025°X-ray Diffraction Gratings
X-ray diffraction by diffraction grating with thin film coating
X-ray diffraction by diffraction grating with etched grooves
X-ray Diffraction Gratings
Grazing incidence phase Fresnel zone plates
1D or 2D x-ray focusing
Groove height up to 100 nm
Zone plate size
- 1D focusing up to 50.50 mm2
- 2D focusing up to 20.0.2 mm2
Substrate: Si, SiO2
Coatings:
- thin films W, Al, Au etc.
- substrate etching
Central and outermost zones of grazing incidence zone plate
X-ray focusing by grazing incidence zone plate on laboratory x-ray source
Bragg-Fresnel lenses
Groove height up to 200 nm
Last zone size 0.1 µm
Substrate: single crystal Si
- multilayer mirrors W/Si, Mo/Be, Cr/Sc etc.
- thin films W, Al, Au etc.
- substrate etching
Full view and central zones of Bragg-Fresnel lens
