INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS RAS  

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OUR ACHIEVEMENTS





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IMT RAS is the initiator of the development of two original scientific leads, which won world recognition: metal nanoelectronics and Bragg-Fresnel X-ray optics. In IMT RAS the pioneering research works on mesascopic properties of metal systems were performed. The main trend of the research works is aimed at different mesascopic systems to reveal the properties capable to form the foundation for the element base of nanoelectronics. Interference, quantum and ballistic phenomena in metal, superconducting, semiconducting and hybrid mesascopic structural and transport phenomena in great molecules (carbon nanotubes and deoxyribonucleic acid molecules) are investigated.

The main technological procedures used for the production of nanostructures are electron-beam lithography with the use of the "Nanomaker" program complex and various ways of precipitation of metal, dielectric and semiconductor films. The methods of "explosive" lithography and chemical, plasma and reactive plasma etching are used as the ways for the transfer of a picture into metal structures. The methods for the production of nanostructures with the use of atomic-force microscopy are developed. The methods for the measurement of electrical transport properties at the temperatures up to 0.4K in a magnetic field and other external actions are widely used as the methods for the investigation of physical properties.

The creation of elements for X-ray optics of high resolution is the second strategy course of IMT RAS. Various types of focusing X-ray elements, which enable one to realize the focusing of X-ray radiation in the energy range from 100 eV to 1 GeV were created at IMT RAS:

  1. Fresnel lenses of normal incidence are intended for focusing of X-ray radiation in the energy range from 100eV to 8 keV to a focal spot up to several tens of nanometers in size with focusing efficiency of X-ray radiation up to 36%;
  2. Discrete multilevel Fresnel lenses of grazing incidence enable one to focus X-ray radiation in energy range from 100 eV to 30 keV to a focal spot up to 0.2 m in size and focusing efficiency up to 90;
  3. Bragg-Fresnel optics on the basis of profiled multilayer interference X-ray mirrors and perfect crystals enables one to perform focusing of X-ray radiation with focal spot dimension up to several tens of nanometers in energy range from several hundreds of eV to 100 keV with focusing efficiency up to 40%;
  4. Refractive X-ray optics enables one to perform focusing of X-ray radiation in energy range from 10 keV to 1 GeV with the efficiency up to 30%.

The main application of X-ray elements is connected with the monitoring of the beams of synchrotron radiation, X-ray microscopy of high space resolution, microfluorescent analysis, microdiffraction, microtomography, and X-ray lithography. These elements are widely used both on the sources of synchrotron radiation and laboratory sources of X-ray radiation for the investigations in the fields of solid-state physics, microelectronics, medicine and biology.