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LABORATORY OF EPITAXIAL MICRO-AND NANOSTRUCTURES
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RUSSIAN VERSION


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laboratory N7
Main
Staff
    Articles
    1. A. A. Demenev, A. V. Koval'chuk, E. A. Polushkin, S. Yu. Shapoval, "IZGOTOVLENIE METODOM TREHMERNOY FEMTOSEKUNDNOY LAZERNOY SUBMIKRONNOY LITOGRAFII SPIRAL'NYH FAZOVYH PLASTINOK DLYa FORMIROVANIYa PUChKOV FOTONOVS ORBITAL'NYM UGLOVYM MOMENTOM", Izvestiya RAN, ser. Fizicheskaya, V85, N2, c.207, 2021g.
    2. Garmash V.I., Zemlyakov V.E., Egorkin V.I., Koval'chuk A.V., S.Yu. Shapoval, "Issledovanie vliyaniya atomarnogo sostava na skorost' plazmohimicheskogo travleniya nitrida kremniya v silovyh tranzistorah na osnove AlGaN/GaN-geteroperehoda", Fizika i Tehnika Poluprovodnikov, V, N8, c.748, 2020g.
    3. Anatoly Kovalchuk, Marina Kovalchuk, Irina Khmyrova, and Sergei Shapoval, "Cavity and contact matching effects in plasma wave terahertz detectors", J Applied Physics, V126, N8, c.084502, 2019g.
    4. Kholopova Yu., Khmyrova I., Larkin S., Zemlyakov V., Egorkin V., Tsatsul'nikov A., Nishidate Y., Shapoval S., "Blue-green InGaN/GaN light-emitting diode with mesh-like top metal electrode", Microelectronic Engineering, V174, NSI, c.80, 2017g.
    5. A.V. Koval'chuk, A.A. Mitina, E.A. Polushkin, E.I. Gal'perin, T.G. Dyuzheva, I.A. Semenchenko, A.I. Semenchenko,S.Yu. Shapoval, "O vozmozhnostyah i osobennostyah metoda ellipsometrii pri issledovanii poverhnosti zhidkostey", Nauchnoe priborostroenie, V26, N4, c.3, 2016g.
    6. D. M. Yermolayev, E. A. Polushkin, A. V. Koval’chuk, S. Yu. Shapoval, K. V. Marem’yanin, V. I. GavrilenkoN. A. Maleev, V. M. Ustinov, V. E. Zemlyakov, V. I. Yegorkin, V. A. Bespalov, V. V. Popov, I. Khmyrova, "Terahertz Response of Tightly Concatenated Two Dimensional InGaAs Field-Effect Transistors Integrated on a Single Chip", Int J High Speed Electronics and Systems, V25, N03n04, c.1640012, 2016g.
    7. Yohei Nishidate, Irina Khmyrova, Julia Kholopova, Evgeny Polushkin, Bogdan Shevchenko, Sergei Shapoval, "Numerical study of light-emitting diode with injected current modulated by designed electrode", Optical Review, V23, N5, c.798, 2016g.
    8. Gal'perin E.I., Dyuzheva T.G., Semenenko I.A., Sholohov V.N., Berdnikov S.N., Mahotina M.S., Koval'chuk A.V., Mitina A.A., Polushkin E.A., Semenenko A.I. , Shapoval S.Yu., "O vozmozhnostyah metoda ul'trazvukovoy elastometrii dlya diagnostiki hronicheskogo pankreatita. Polnyy faktornyy eksperiment", Ul'trazvukovaya i funkcional'naya diagnostika, V, N2, c.19, 2015g.
    9. D. M. Yermolayev, E. A. Polushkin, S. Yu. Shapoval, V. V. Popov, K. V. Marem’yanin, V. I. Gavrilenko, N. A. Maleev, V. M. Ustinov, V. E. Zemlyakov, V. I. Yegorkin, V. A. Bespalov, A. V. Muravjov,S. L. Rumyantsev, M. S. Shur,, "Detection of Terahertz Radiation by Dense Arrays of InGaAs Transistors", Int J High Speed Electronics and Systems, V24, N1&2, c.23, 2015g.
    10. A. V. Koval'chuk, S. Yu. Shapoval, S. S. Lebedev, S. A. Steblin, A. V. Volosov, N. I. Kargin, "Primenenie IK-Fur'e spektrometrii dlya opredeleniya atomarnogo sostava submikronnyh sloev nitrida kremniya HxSirNzHy", Vestnik Nac. issled. yadernogo univ. «MIFI», V3, N2, c.189, 2014g.
    11. V.I. Garmash, V.I. Egorkin, V.E. Zemlyakov, A.V. Koval'chuk, S.Yu. Shapoval, "Issledovanie vliyaniya struktury plazmohimicheskogo nitrida kremniya na maskiruyuschie svoystva", Izvestiya VUZov. Elektronika, V109, N5, c.33, 2014g.
    12. Irina Khmyrova, Norikazu Watanabe, Julia Kholopova, Anatoly Kovalchuk, Sergei Shapoval, "Light extraction in planar light-emitting diode with nonuniform current injection: model and simulation", Applied Optics, V, N21, c.4734, 2014g.
    13. 1. Irina Khmyrova, Norikazu Watanabe, Julia Kholopova, Anatoly Kovalchuk, and Sergei Shapoval, "Light extraction in planar light-emitting diode with nonuniform current injection: model and simulation", Applied Optics, V53, N21, c.4734, 2014g.
    14. A. Konishi, R. Yamase, I. Khmyrova, Yu. Kholopova, E. Polushkin, A. Kovalchuk, V.Sirotkin, and S. Shapoval, "Analytical model of light-emitting diodes with patterned contact", Optical Review, V20, N2, c.214, 2013g.
    15. Irina Khmyrova, Ryosuke Yamase, Norikazu Watanabe, Takao Maeda, Elena Shestakova, Evgeny Polushkin, Anatoly Kovalchuk, Sergei Shapoval, "Analysis of resonant MEMS based on high-electron mobility transistor-like structure", Physica Status Solidi C, V9, N2, c.399, 2012g.
    16. R. Yamase, T. Maeda, I. Khmyrova, E. Shestakova, E. Polushkin, A. Kovalchuk, and S. Shapoval, "Study of Fringing Effects in Multi-Cantilever HEMT-Based Resonant MEMS", Int. J. Appl. Electromagnetics and Mechanics, V38, N2-3, c.93, 2012g.
    17. K.V. Marem'yanin, D.M. Ermolaev, D.V. Fateev, S.V. Morozov, N.A. Maleev, V.E. Zemlyakov, V.I. Gavrilenko, V.V. Popov, S.Yu. Shapoval, "Shirokoaperturnyy detektor teragercovogo izlucheniya na osnove tranzistornoy struktury GaAs/InGaAs so schelevym reshetochnym zatvorom bol'shoy ploschadi.", Pis'ma v ZhTF, V36, N8, c.39, 2010g.
    18. Barabanenkov M.Yu., Koval'chuk A.V. Polushkin E.A., Sirotkin V.V., Holopova Yu.V., Shapoval S.Yu., "Elektroopticheskie harakteristiki svetoizluchayuschego dioda s periodicheski strukturirovannym kontaktom", Vestnik MGTU im. Baumana, seriya Estestvennye nauki, V33, N2, c.48, 2009g.
    19. M.Yu.Barabanenkov, A.V.Koval'chuk, E.A.Polushkin, , V.V.Sirotkin, , Yu.V.Holopova S.Yu.Shapoval, "Elektroopticheskie harakteristiki svetoizluchayuschego dioda s periodicheski strukturirovannym kontaktom", Vestnik MGTU im. Baumana, seriya Estestvennye nauki, V2, N33, c.48, 2009g.
    20. M.Yu.Barabanenkov, V.V.Kazmiruk, S.Yu.Shapoval, "Method of matrix Riccati equation for nanoshape control of diffraction gratings", Proceedings of SPIE, VV7390, NN, c.1, 2009g.
    21. M.Yu. Barabanenkov, V.V.Sirotkin, Yu.V. Holopova, A.V. Koval'chuk, N.E. Antonova, E.A. Polushkin, S.Yu. Shapoval, "Svetoizluchayuschiy diod s elektrodom v vide lentochnoy difrakcionnoy reshetki", Sb. "Lazernaya i optikoelektronnaya tehnika", Izd. BGU, Minsk, V, N11, c.58, 2008g.
    22. M.Yu. Barabanenkov, V.V. Sirotkin, Yu.V. Holopova, A.V.koval'chuk, N.E. Antonova, E.A.Polushkin, S.Yu. Shapoval, "Svetoizluchayuschiy diod s elektrodom v vide lentochnoy difrakcionnoy reshetki.", Sb. "Lazernaya i optikoelektronnaya tehnika", Izd. BGU, Minsk, V, N11, c.58, 2008g.
    23. A. Kovalchuk, G. Beshkov, S. Shapoval, "Dehydrogenation of Low-temperature ECR-plasma Silicon Nitride Films under Rapid Thermal Annealing", Journal of Research in Physics, V31, N1, c.37, 2007g.
    Monographs
    1. D M Yermolayev, E A Polushkin, A V Koval’chuk, S Yu Shapoval, K V Marem’yanin, V I Gavrilenko, N A Maleev, V M Ustinov, V E Zemlyakov, V I Yegorkin, V A Bespalov, V V Popov and I Khmyrova, "FUNDAMENTAL AND APPLIED PROBLEMS OF TERAHERTZ DEVICES AND TECHNOLOGIES. Monograph number 2: Terahertz Response of Tightly Concatenated Two Dimensional InGaAs Field-Effect Transistors Integrated on a Single Chip", World Scientific Publishing Company. Series: Selected Topics in Electronics and Systems - Volume 58, p. 11 - 21, 2017g., pech.l.:0.688
    2. Kabardin O.F., "Fizika. 7 klass.", Prosvyaschenie, 2009g., pech.l.:176.000
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