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LABORATORY OF SCANNING ELECTRON MICROSCOPY
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laboratory N15
Main
Staff
    Articles
    1. Kaz'miruk V.V., Kurganov I.G., Podkopaev A.A., Savickaya T.N., "Opredelenie ploskosti fokusirovki puchka v REM po zavisimosti kontrasta signala ot potenciala fokusiruyuschego elektroda", Poverhnost'. Rentgenovskie, sinhrotronnye i neytronnye issledovaniya., V, N9, c.61, 2020g.
    2. Kaz'miruk V.V., Kurganov I.G., Savickaya T.N., "Raschet miniatyurnoy formiruyuschey linzy vysokovol'tnogo elektronnogo litografa", Poverhnost'. Rentgenovskie, sinhrotronnye i neytronnye issledovaniya., V, N12, c.89, 2020g.
    3. Kaz'miruk V.V., Kurganov I.G., Podkopaev A.A., Savickaya T.N., "Optimizaciya elektronno-opticheskoy sistemy rastrovogo elektronnogo mikroskopa dlya izmereniya mikro- i nanoob'ektov", Poverhnost'. Rentgenovskie, sinhrotronnye i neytronnye issledovaniya., V, N7, c.36, 2019g.
    4. Kaz'miruk V.V., Kurganov I.G., Osipov N.N., Podkopaev A.A., Savickaya T.N., "ISSLEDOVANIE FORMIROVANIYa SIGNALA, OBRAZOVANNOGO ISTINNO VTORIChNYMI ELEKTRONAMI, PRI NIZKOVOL'TNOM REZhIME RABOTY REM", Poverhnost'. Rentgenovskie, sinhrotronnye i neytronnye issledovaniya., V, N4, c.21, 2017g.
    5. Kaz'miruk V.V., Kurganov I.G., Osipov N.N., Podkopaev A.A., Savickaya T.N., "[Dostup k polnomu tekstu otkryt] MIHAIL VALENTINOVICh KOVAL'ChUK (K 70-LETIYu SO DNYa ROZhDENIYa) 3-6 0 [Dostup k polnomu tekstu otkryt] ISSLEDOVANIE FORMIROVANIYa VTORIChNO-EMISSIONNOGO SIGNALA PRI NIZKOVOL'TNOM REZhIME RABOTY REM", Poverhnost'. Rentgenovskie, sinhrotronnye i neytronnye issledovaniya., V, N9, c.7, 2016g.
    6. Kaz'miruk v.v., Kurganov I.G., Savickaya T.N., "MODIFIKACIYa NIZKOVOL'TNOY ELEKTRONNO-ZONDOVOY SISTEMY", Izvestiya RAN, ser. Fizicheskaya, V78, N9, c.1058, 2014g.
    7. Kaz'miruk V.V., Kurganov I.G., Savickaya T.N., "Regulirovka parametrov elektronno-zondovyh sistem po kartam raspredeleniya intensivnosti vtorichno-emissionnogo signala", Poverhnost'. Rentgenovskie, sinhrotronnye i neytronnye issledovaniya., V, N12, c.31, 2014g.
    8. V.V. Kazmiruk, I.G. Kurganov, T.N. Savitskaja, "Mask Less Lithography Cluster for Low and Medium Volume Manufacturing", Electrotechnica+Electronica, V49, N5-6, c.284, 2014g.
    9. Kaz'miruk V.V., Savickaya T.N., "Optimizaciya rezhimov registracii vtorichno-emissionnyh signalov pri 2D-metrologii nanostruktur", Poverhnost'. Rentgenovskie, sinhrotronnye i neytronnye issledovaniya., V, N2, c.1, 2013g.
    10. Kaz'miruk V.V., Savickaya T.N., "AVTOMATIZACIYa REZhIMA ELEKTRONNO-ZONDOVOGO MONITORINGA DEFEKTOV ShABLONOV DLYa IMPRINT-LITOGRAFII", Izvestiya RAN, ser. Fizicheskaya, V76, N9, c.1077, 2012g.
    11. V.V. Kaz'miruk, T.N. Savickaya, "Razrabotka formiruyuschey linzy dlya nizkovol'tnyh elektronno-zondovyh sistem vysokogo razresheniya", Izvestiya RAN, ser. Fizicheskaya, V75, N9, c.1263, 2011g.
    12. M.Yu. Barabanenkov, V.V. Kaz'miruk, T.N. Savickaya, "Razrabotka metodov detektirovaniya signalov dlya elektronno-opticheskogo in-situ-monitoringa periodicheskih struktur", Izvestiya RAN, ser. Fizicheskaya, V75, N9, c.1259, 2011g.
    13. M.Yu.Barabanenkov, V.V.Kaz'miruk, T.N.Savickaya, "Razrabotka metoda elektron-opticheskogo in-situ monitoringa periodicheskih struktur", Poverhnost'. Rentgenovskie, sinhrotronnye i neytronnye issledovaniya., V, N9, c.35, 2010g.
    14. V.V. Kaz'miruk, T.N. Savickaya, "Pogreshnosti izmereniy lineynyh razmerov struktur pri registracii obratno rasseyannyh elektronov v REM", Izvestiya RAN, ser. Fizicheskaya, V74, N7, c.1029, 2010g.
    15. M.Yu.Barabanenkov, V.V.Kazmiruk, S.Yu.Shapoval, "Method of matrix Riccati equation for nanoshape control of diffraction gratings", Proceedings of SPIE, V7390, N, c.1, 2009g.
    16. M.Yu.Barabanenkov, V.V.Kazmiruk, "Resonance optical effects and artificial microphotonic electromagnetic materials", ECS Transactions, V23, N1, c.469, 2009g.
    17. V.V.Kazmiruk, M.Yu.Barabanenkov, "Optimization of e-beam systems for wafer defect inspection and for die-to-database verification", ECS Transactions, V23, N1, c.43, 2009g.
    18. V. V. Kaz'miruk, T. N. Savickaya, "NOVYE PRINCIPY SOZDANIYa MNOGOLUChEVYH MIKROMINIATYuRNYH ELEKTRONNO-OPTIChESKIH SISTEM DLYa DIAGNOSTIKI POLUPROVODNIKOVYH STRUKTUR", Izvestiya RAN, ser. Fizicheskaya, V73, N4, c.485, 2009g.
    19. V. V. Kaz'miruk, T. N. Savickaya, "Opredelenie predel'nyh parametrov mnogoluchevyh elektronno-opticheskih sistem dlya diagnostiki poluprovodnikovyh struktur", Poverhnost'. Rentgenovskie, sinhrotronnye i neytronnye issledovaniya., V10, N, c.37, 2009g.
    20. Kaz'miruk V.V., "Skaniruyuschie elektronnye mikroskopy MikroSkan serii MS20.", Izvestiya RAN, ser. Fizicheskaya, V72, N11, c.1550, 2008g.
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