INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS RAS  

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RUSSIAN VERSION


word,
as typed:


laboratory N21

Head of Laboratory:

Dr. Matveev V.N.



Dr. Despotuli Alexander L.



D'yachenko Rasma Yanovna



Klimenko Galina Leonidovna



PhD Kononenko Oleg



Levashov Vladimir I