 |
Title: Laboratory of epitaxial structures |
|
Head of Laboratory: Dr. Sergei Shapoval |
|
Established: 1986 |
|
The Laboratory of Epitaxial structures was established by corresponding member of RAS Professor Cheslav Kopetskii and Dr. Sergei Shapoval in 1986. The establishment of the Laboratory at the Institute of Microelectronics Technology was encouraged by a necessity to organize the fundamental and technological research works within the area of epitaxial growth, thin film deposition and etching for nanotechnology, microwave devices. |
|
Initial works were based on experience within the area of technological processes developing for Si and III-V microwave devices and IC’s, memory IC’s like 558ÐÐ1, 558ÐÐ2, 573ÐÔ1, 573ÐÔ2, 6801, amplifiers like 544ÓÄ1, 544ÓÄ2, mA710. |
|
Address: Laboratory of epitaxial structures, Institute of Microelectronics Technology RAS, 142432 Chernogolovka, Moscow district, Russia |